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Volumn 84, Issue 3, 2006, Pages 309-312
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Reactive sputter deposition and metal-semiconductor transition of FeS films
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Author keywords
[No Author keywords available]
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Indexed keywords
IRON COMPOUNDS;
METALS;
PHASE TRANSITIONS;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SCANNING ELECTRON MICROSCOPY;
SECONDARY ION MASS SPECTROMETRY;
SEMICONDUCTOR MATERIALS;
SPUTTER DEPOSITION;
X RAY DIFFRACTION;
METAL SEMICONDUCTOR TRANSITION;
ORIENTATION;
RADIO FREQUENCY REACTIVE SPUTTERING;
SECONDARY ION MASS SPECTROSCOPY;
METALLIC FILMS;
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EID: 33745125755
PISSN: 09478396
EISSN: 14320630
Source Type: Journal
DOI: 10.1007/s00339-006-3624-y Document Type: Article |
Times cited : (6)
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References (15)
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