A silicon cantilever probe card with tip-to-pad electric feed-through and automatic isolation of the metal coating

Journal of Micromechanics and Microengineering

Volumn 16, Issue 7, 2006, Pages 1215-1220

  Wang, Fei ^a,b   Li, Xinxin ^a   Guo, Nanxiang ^a   Wang, Yuelin ^a   Feng, Songlin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATIC TESTING; CANTILEVER BEAMS; CHARACTERIZATION; ELECTRIC RESISTANCE; METAL ANALYSIS; MICROMACHINING; PROBES; SILICON;

PARASITIC CAPACITANCE; SILICON CANTILEVER PROBE CARD; SINO IC TECHNOLOGY CO. LTD (CO); SPRING CONSTANT;

COATING TECHNIQUES;

EID: 33745113191     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/7/014     Document Type: Article

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