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Volumn 80, Issue 6, 2006, Pages 653-657

Defects generation by hydrogen passivation of polycrystalline silicon thin films

Author keywords

ERDA; Grain size; H2 molecules; Hydrogen passivation; Photoluminescence; Raman spectroscopy; Si H2 bonding

Indexed keywords

CHEMICAL BONDS; GRAIN SIZE AND SHAPE; PHOTOLUMINESCENCE; RAMAN SPECTROSCOPY; SILICON; THIN FILMS;

EID: 33744956253     PISSN: 0038092X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solener.2005.10.013     Document Type: Article
Times cited : (13)

References (9)
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    • (2000) Nucl. Instr. Meth. Phys. Res. B , vol.161-163 , pp. 1054-1057
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  • 2
    • 0037544234 scopus 로고    scopus 로고
    • Photoluminescence of doped and undoped laser crystallized polycrystalline silicon
    • Brendel K., Nickel H.N., Lips K., and Fuhs W. Photoluminescence of doped and undoped laser crystallized polycrystalline silicon. Solid State Commun. 126 (2003) 499-502
    • (2003) Solid State Commun. , vol.126 , pp. 499-502
    • Brendel, K.1    Nickel, H.N.2    Lips, K.3    Fuhs, W.4
  • 3
    • 0038559962 scopus 로고    scopus 로고
    • Finding interstitial oxygen in an Si substrate during low-temperature plasma oxidation
    • Hyun Kim B., Hyung Ahn J., and Tea Ahn B. Finding interstitial oxygen in an Si substrate during low-temperature plasma oxidation. Appl. Phys. Lett. 82 (2003) 2682-2684
    • (2003) Appl. Phys. Lett. , vol.82 , pp. 2682-2684
    • Hyun Kim, B.1    Hyung Ahn, J.2    Tea Ahn, B.3
  • 4
    • 1642454700 scopus 로고    scopus 로고
    • Nucleation control by intermittent supply of dichlorosilane towards the fabrication of polycrystalline silicon thin films with large grain size
    • Ishikawa Y., Uraoka Y., and Fuyuki T. Nucleation control by intermittent supply of dichlorosilane towards the fabrication of polycrystalline silicon thin films with large grain size. Jpn. J. Appl. Phys. 40 (2003) 6759-6765
    • (2003) Jpn. J. Appl. Phys. , vol.40 , pp. 6759-6765
    • Ishikawa, Y.1    Uraoka, Y.2    Fuyuki, T.3
  • 6
    • 1642454703 scopus 로고    scopus 로고
    • Analysis of defects in polycrystalline silicon thin film using Raman scattering spectroscopy
    • Kitahara K., Ohnishi K., Kato Y., Yamaguchi R., and Kurosawa T. Analysis of defects in polycrystalline silicon thin film using Raman scattering spectroscopy. Jpn. J. Appl. Phys. 42 (2003) 6742-6747
    • (2003) Jpn. J. Appl. Phys. , vol.42 , pp. 6742-6747
    • Kitahara, K.1    Ohnishi, K.2    Kato, Y.3    Yamaguchi, R.4    Kurosawa, T.5
  • 7
    • 0001497873 scopus 로고    scopus 로고
    • Correlation between electron mobility and silicon-hydrogen bonding configurations in plasma-hydrogenated polycrystalline silicon thin films
    • Kitahara K., Murakami S., Hara A., and Nakajima K. Correlation between electron mobility and silicon-hydrogen bonding configurations in plasma-hydrogenated polycrystalline silicon thin films. Appl. Phys. Lett. 72 (1998) 2436-2438
    • (1998) Appl. Phys. Lett. , vol.72 , pp. 2436-2438
    • Kitahara, K.1    Murakami, S.2    Hara, A.3    Nakajima, K.4
  • 8
    • 0344210371 scopus 로고    scopus 로고
    • Formation of hydrogen molecules in crystalline silicon
    • Leitch R.W.A., Weber J., and Alex V. Formation of hydrogen molecules in crystalline silicon. Mater. Sci. Eng. B 58 (1999) 6-12
    • (1999) Mater. Sci. Eng. B , vol.58 , pp. 6-12
    • Leitch, R.W.A.1    Weber, J.2    Alex, V.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.