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Volumn 117-118, Issue , 1997, Pages 37-41

Raman spectroscopic study on hydrogen molecules in crystalline silicon treated with atomic hydrogen

(9) Ishioka, K a Nakamura, K G a Kitajima, M a Fukata, N b Sasaki, S b Murakami, K b Fujimura, S c Kikuchi, J c Haneda, H a

a NATIONAL INSTITUTE FOR MATERIALS SCIENCE (Japan)

b UNIVERSITY OF TSUKUBA (Japan)

c FUJITSU LABORATORIES LTD (Japan)

Author keywords

ESR; Hydrogen molecules; Raman spectroscopy

Indexed keywords

ATOMS; CRYSTALLINE MATERIALS; ELECTRON SPIN RESONANCE SPECTROSCOPY; HYDROGEN; HYDROGENATION; MOLECULAR VIBRATIONS; MOLECULES; RAMAN SPECTROSCOPY; SEMICONDUCTOR DOPING; SUBSTRATES; THERMAL EFFECTS;

MOLECULAR VIBRATIONAL LINES;

SEMICONDUCTING SILICON;

EID: 0031548795 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(97)80048-7 Document Type: Article

Times cited : (10)

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