Correlation between electron mobility and silicon-hydrogen bonding configurations in plasma-hydrogenated polycrystalline silicon thin films

Applied Physics Letters

Volumn 72, Issue 19, 1998, Pages 2436-2438

  Kitahara, K ^a   Murakami, S ^a   Hara, A ^a   Nakajima, K ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001497873     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121376     Document Type: Article

References (9)

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