Field emission from ZrC and ZrC films on Mo field emitters

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 4, 1998, Pages 2057-2062

  Mackie, W A ^a   Xie, Tianbao ^a   Matthews, M R ^a   Routh Jr , B P ^a   Davis, P R ^a  

^a Linfield Research Institute   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000802574     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590214     Document Type: Article

References (12)

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2. W. A. Mackie, J. L. Morrissey, C. H. Hinrichs, R. L. Hartman, and P. R. Davis, in Tri-Service/NASA Cathode Workshop, 1992 Proceedings, edited by J. W. Gibson (Palisades Institute for Research Services, Washington, 1992).
3. W. A. Mackie, R. L. Hartman, and P. R. Davis, Appl. Surf. Sci. 67, 29 (1993).
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5. M. L. Yu, H. S. Kim, B. W. Hussey, T. H. P. Chang, and W. A. Mackie, J. Vac. Sci. Technol. 14, 2041 (1996).
6. W. A. Mackie, T. Xie, J. E. Blackwood, S. C. Williams, and P. R. Davis, J. Vac. Sci. Technol. B 16, 1215 (1998).
7. W. A. Mackie, T. Xie, and P. R. Davis, "Field emission from HfC or Ni films deposited on single tip Mo field emitters." paper delivered at ICOPS-97, San Diego, CA, May 1997.
8. W. A. Mackie, T. Xie, J. E. Blackwood, and P. R. Davis, "Field emission from HfC films on Mo field emitter arrays and from HfC arrays." paper delivered at ICOPS-97, San Diego, CA, May 1997.
9. W. A. Mackie and C. H. Hinrichs, J. Cryst. Growth 87, 101 (1988).
10. High stoichiometry material obtained from Applied Physics Technologies, 5882 Booth Bend Rd., McMinnville, OR 97128.
11. W. A. Mackie, R. L. Hartman, M. A. Anderson, and P. R. Davis, J. Vac. Sci. Technol. B 12, 722 (1994).
12. W. A. Mackie, T. Xie, and P. R. Davis, J. Vac. Sci. Technol. 13, 2459 (1995).