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Volumn 53, Issue 6, 2006, Pages 1289-1293

Stress-related hydrogen degradation of 0.1-μm InP HEMTs and GaAs PHEMTs

Author keywords

GaAs; High electron mobility transitor (HEMT); Hydrogen; InP; Pseudomorphic high electron mobility transitor (PHEMT); Reliability

Indexed keywords

DEGRADATION; HYDROGEN; PIEZOELECTRICITY; RELIABILITY; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE; THRESHOLD VOLTAGE;

EID: 33744796836     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2006.873882     Document Type: Article
Times cited : (12)

References (14)
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  • 8
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    • Nov
    • S. D. Mertens and J. A. del Alamo, "A model for Hydrogen-induced piezoelectric effect in InP HEMTs and GaAs PHEMTs," IEEE Trans. Electron Devices, vol. 49, no. 11, pp. 1849-1855, Nov. 2002.
    • (2002) IEEE Trans. Electron Devices , vol.49 , Issue.11 , pp. 1849-1855
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  • 11
    • 0024766321 scopus 로고
    • "Mechanical properties of thin films"
    • Nov
    • W. Nix, "Mechanical properties of thin films," Metall. Trans., A, vol. 20A, no. 11, pp. 2217-2245, Nov. 1989.
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  • 12
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  • 13
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    • (1992) Proc. Mater. Res. Soc. Symp. , vol.230 , pp. 103-108
    • Vermeulen, A.C.1    Delhez, R.2    Mittemeijer, E.J.3
  • 14
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    • "Deformation mechanisms of Al films on oxidized Si wafers"
    • C. A. Volkert, C. F. Alofs, and J. R. Liefting, "Deformation mechanisms of Al films on oxidized Si wafers," J. Mater. Res., vol. 9, no. 5, pp. 1147-1155, 1994.
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.