Conversion of perhydropolysilazane-to-silica thin films by exposure to vapor from aqueous ammonia at room temperature

Journal of the Ceramic Society of Japan

Volumn 114, Issue 1330, 2006, Pages 517-523

  Kubo, Tomoko ^a   Kozuka, Hiromitsu ^a  

^a KANSAI UNIVERSITY   (Japan)

Author keywords

Polysilazane; Silica; Thin films

Indexed keywords

ABSORPTION SPECTROSCOPY; AMMONIA; CONCENTRATION (PROCESS); CONTACT ANGLE; FUSED SILICA; POLYSILANES; SPIN COATING; TEMPERATURE; THIN FILMS;

AQUEOUS AMMONIA; PERHYDROPOLYSILAZANE (PHPS);

SILICA;

EID: 33744793761     PISSN: 09145400     EISSN: 13486535     Source Type: Journal    
DOI: 10.2109/jcersj.114.517     Document Type: Article

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