Fabrication of supported Si3N4 membranes using the pyrolysis of liquid polysilazane precursor

Journal of Membrane Science

Volumn 147, Issue 1, 1998, Pages 23-33

  Mori, Hidetoshi ^a   Mase, Shigekazu ^a   Yoshimura, Noriyuki ^a   Hotta, Tadashi ^b   Ayama, Kohichi ^c   Tsubaki, Jun Ichiro ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b JAPAN FINE CERAMICS CENTER   (Japan)

^c CHISSO CORPORATION   (Japan)

Author keywords

Ceramic membrane; Gas separation; Pyrolysis; Silicon nitride

Indexed keywords

CARBON DIOXIDE; CERAMIC MATERIALS; HELIUM; MECHANICAL PERMEABILITY; NITROGEN; ORGANIC POLYMERS; PERMSELECTIVE MEMBRANES; POROUS MATERIALS; PYROLYSIS; SEPARATION; SILICON NITRIDE; TRANSPORT PROPERTIES;

CERAMIC MEMBRANES; POLYSILAZANE;

GAS PERMEABLE MEMBRANES;

CARBON DIOXIDE; HELIUM; NITROGEN; POLYSILAZANE; SILICON DERIVATIVE; SILICON NITRIDE; UNCLASSIFIED DRUG;

ARTICLE; ARTIFICIAL MEMBRANE; CERAMICS; GAS TRANSPORT; MEMBRANE PERMEABILITY; MEMBRANE STRUCTURE; PRESSURE; PRIORITY JOURNAL; PYROLYSIS; SCANNING ELECTRON MICROSCOPY;

EID: 0032547336     PISSN: 03767388     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0376-7388(98)00116-1     Document Type: Article

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