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Volumn 31, Issue 1-3 SPEC.ISS., 2004, Pages 257-261
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Preparation of hot water-resistant silica thin films from polysilazane solution at room temperature
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Author keywords
Coating; Infrared absorption spectra; Polysilazane; Silica; Thin films
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Indexed keywords
AMMONIA;
COATINGS;
INFRARED SPECTROSCOPY;
SILICA;
SILICON;
SINGLE CRYSTALS;
SOLUTIONS;
THERMAL EFFECTS;
WATER;
XYLENE;
INFRARED ABSORPTION SPECTRA;
PERHYDROPOLYSILAZANE (PHPS) FILMS;
SILICA FILMS;
SOAKING;
THIN FILMS;
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EID: 9244233322
PISSN: 09280707
EISSN: None
Source Type: Journal
DOI: 10.1023/B:JSST.0000047999.87439.c2 Document Type: Article |
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Times cited : (57)
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References (5)
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