Time evolution of In2O3 rod-like structures in metalorganic chemical vapor deposition process

Journal of Materials Science

Volumn 41, Issue 10, 2006, Pages 3189-3191

  Kim, Hyoun Woo ^a   Kim, Nam Ho ^a   Shim, Seung Hyun ^a   Myung, Ju Hyun ^a  

^a Inha University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; GROWTH KINETICS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES;

GROWTH TIME; ROD-LIKE STRUCTURES; STRUCTURAL PROPERTIES; TIME EVOLUTION;

INDIUM COMPOUNDS;

EID: 33744539280     PISSN: 00222461     EISSN: 15734803     Source Type: Journal    
DOI: 10.1007/s10853-006-6369-2     Document Type: Article

References (21)

1. K. HARA, T. HORIGUCHI, T. KINOSHITA, K. SAYAMA, H. SOGIHARA and H. ARAKAWA, Sol. Energy Mater. Sol. Cells 64 (2000) 115.
2. K. L .CHOPRA, S. MAJOR and D. K. PANDYA, Thin Solid Films 102 (1983) 1.
3. H. KOMINAMI, T. NAKAMURA, K. SOWA,Y. NAKANISHI, Y. HATANAKA and G. SHIMAOKA, Appl. Surf. Sci. 113/114 (1997) 519.
4. H. YAMAURA, T. JINKAWA, J. TAMAKI, K. MORIGA, N. MIURA and N.YAMAZOE, Sensor. Actuator B 35/36 (1996) 325.
5. A. GURLO, N. BARSAN, M. IVANOVSKAYA, U. WEIMER and W. GOPEL, Sensor. Actuator B ibid. 47 (1998) 92.
6. M. Z. ATASHBAR, B. GONG, H. T. SUN, W. WLODARSKI and R. LAMB, Thin Solid Films 354 (1999) 222.
7. C. R. MARTIN, Science 266 (1994) 1961.
8. W. SCHWARZACHER, O. I. KASYUTICH, P. R. EVANS, M. G. DARBYSHIRE, G. YI, V. M. FEDOS YUK, F. ROUSSEAUX, E. CAMBRIL and D. DECANINI, J. Magn. Magn. Mater. 198/199 (1999) 185.
9. Z. W. PAN, Z. R. DAI and Z. L. WANG, Science 291 (2001) 1947.
10. J. ZHANG, X. QING, F. H. JIANG and Z. H. DAI, Chem. Phys. Lett. 371 (2003) 311.
11. X. C.WU.J. M. HONG.Z. J. HAN and Y. R. TAO, Chem. Phys. Lett. ibid. 373 (2003) 28.
12. P. NGUYEN, H. T. NG, T. YAMADA, M. K. SMITH, J. LI, J. HAN and M. MEYYAPPAN, Nano Lett. 4 (2004) 651.
13. X.S. PENG, G. W. MENG, J. ZHANG, X. F. WANG, Y. W. WANG, C. Z. WANG and L. D. ZHANG, J. Mater. Chem. 12 (2002) 1602.
14. J. S. JEONG, J. Y. LEE, C. J. LEE, S. J. AN and G-C. YI, Chem. Phys. Lett. 384 (2004) 246.
15. Y. LI,Y. BANDO and D. GOLBERG, Adv. Mater. 15 (2003) 581.
16. C. H. LIANG, G. W. MENG, Y. LEI, F. PHILLIPP and L. D. ZHANG, Adv. Mater. ibid. 13 (2001) 1330.
17. C. LI, D. H. ZHANG, S. HAN, X. L. LIU, T. TANG and C. W. ZHOU, Adv. Mater. ibid. 15 (2003) 143.
18. M. J. ZHENG, L. D. ZHANG, G. H. LI, X. Y. ZHANG and X. F. WANG, Appl. Phys. Lett. 79 (2001) 839.
19. B. CHENG and E. T. SAMULSKI, J. Mater. Chem. 11 (2001) 2901.
20. H. W. KIM and N. H. KIM, Appl. Surf. Sci. 230 (2004) 301.
21. H. W. KIM, K. S. KIM and C. LEE, J. Mater. Sci. Lett. 22 (2003) 1117.