High aspect ratio spiral microcoils fabricated by a silicon lost molding technique

Journal of Micromechanics and Microengineering

Volumn 16, Issue 5, 2006, Pages 1057-1061

  Jiang, Y G ^a   Ono, T ^a   Esashi, M ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC NETWORK ANALYSIS; ELECTROPLATING; MAGNETIC RESONANCE IMAGING; MOLDING; REACTIVE ION ETCHING; SILICON;

MICROCOILS; PARASITIC CAPACITANCE; SILICON LOST MOLDING PROCESS;

ASPECT RATIO;

EID: 33744477636     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/5/025     Document Type: Article

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