Micro-structure and mechanical properties of C/C multilayers films grown by filtered cathodic vacuum arc deposition

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology

Volumn 26, Issue 1, 2006, Pages

  Gou, Yinning ^a   Huang, Nan ^a   Sun, Hong ^a   Zhang, Wenying ^a   Leng, Yongxiang ^a  

^a SOUTHWEST JIAOTONG UNIVERSITY   (China)

Author keywords

C C multilayer films; Filtered cathodic vacuum arc (FCVA); Raman spectroscopy; Wear resistance; XPS

Indexed keywords

CHARACTERIZATION; ELECTRIC ARCS; MAGNETIC FILTERS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; MICROSTRUCTURE; MULTILAYERS; RAMAN SPECTROSCOPY; SPUTTER DEPOSITION; STAINLESS STEEL; SUBSTRATES; THIN FILMS; TITANIUM; VACUUM TECHNOLOGY; WEAR RESISTANCE; X RAY PHOTOELECTRON SPECTROSCOPY;

C/C MULTILAYER FILMS; FILTERED CATHODIC VACUUM ARC (FCVA); FRICTION COEFFICIENT; INDENTATION HARDNESS; PIN-ON-DISK TRIBOMETER; STAINLESS STEEL SUBSTRATES;

CARBON CARBON COMPOSITES;

EID: 33646934953     PISSN: 16727126     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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