SCOPUS 정보 검색 플랫폼

Volumn 45, Issue 4 B, 2006, Pages 3672-3679

Carbon nanotube transistor fabrication assisted by topographical and conductive atomic force microscopy

Author keywords

C AFM; CMOS; CNT; CNT FET; CVD; Nanocluster

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON NANOTUBES; CATALYSTS; CHEMICAL VAPOR DEPOSITION; CMOS INTEGRATED CIRCUITS; ELECTRODES; OPTIMIZATION;

CATALYST METALS; CNT-FET FABRICATIONS; DRAIN ELECTRODES; GEOMETRICAL PROPERTIES; SOURCE ELECTRODES;

FIELD EFFECT TRANSISTORS;

EID: 33646904788 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.45.3672 Document Type: Article

Times cited : (14)

References (15)

1
- 0342819025
- S. Iijima: Nature 354 (1991) 56.
- (1991) Nature , vol.354 , pp. 56
- Iijima, S.¹

2
- 0032492884
- S. J. Tans, A. R. M. Verschueren and C. Dekker: Nature 393 (1998) 49.
- (1998) Nature , vol.393 , pp. 49
- Tans, S.J.¹ Verschueren, A.R.M.² Dekker, C.³

3
- 0005836651
- R. Martel, T. Schmidt, H. R. Shea, T. Hertel and Ph. Avouris: Appl. Phys. Lett. 73 (1998) 2447.
- (1998) Appl. Phys. Lett. , vol.73 , pp. 2447
- Martel, R.¹ Schmidt, T.² Shea, H.R.³ Hertel, T.⁴ Avouris, Ph.⁵

4
- 14644400516
- U. Schwalke and Y. Stefanov: Microelectron. Reliab. 45 (2005) 790.
- (2005) Microelectron. Reliab. , vol.45 , pp. 790
- Schwalke, U.¹ Stefanov, Y.²

5
- 0032578904
- J. Kong, H. T. Soh, A. M. Cassell, C. F. Quate and H. Dai: Nature 395 (1998) 878.
- (1998) Nature , vol.395 , pp. 878
- Kong, J.¹ Soh, H.T.² Cassell, A.M.³ Quate, C.F.⁴ Dai, H.⁵

6
- 1342344808
- R. Seidel, G. S. Duesburg, E. Unger, A. P. Graham, M. Liebau and F. Kreupl: J. Phys. Chem. B 108 (2004) 1888.
- (2004) J. Phys. Chem. B , vol.108 , pp. 1888
- Seidel, R.¹ Duesburg, G.S.² Unger, E.³ Graham, A.P.⁴ Liebau, M.⁵ Kreupl, F.⁶

7
- 33646936445
- Darmstadt University of Technology
- W. Kutschenko: Internal student report S251, Darmstadt University of Technology, 2005.
- (2005) Internal Student Report , vol.S251
- Kutschenko, W.¹

8
- 79956052237
- T. Brintlinger, Y.-F. Chen, T. Dürkop, E. Cobas, M. S. Fuhrer, J. D. Barry and J. Melngailis: Appl. Phys. Lett. 81 (2002) 2454.
- (2002) Appl. Phys. Lett. , vol.81 , pp. 2454
- Brintlinger, T.¹ Chen, Y.-F.² Dürkop, T.³ Cobas, E.⁴ Fuhrer, M.S.⁵ Barry, J.D.⁶ Melngailis, J.⁷

9
- 24144447266
- M. S. Kabir, R. E. Morjan, O. A. Nerushev, P. Lundgren, S. Bengtsson, P. Enokson and E. E. B. Campbell: Nanotechnology 16 (2005) 458.
- (2005) Nanotechnology , vol.16 , pp. 458
- Kabir, M.S.¹ Morjan, R.E.² Nerushev, O.A.³ Lundgren, P.⁴ Bengtsson, S.⁵ Enokson, P.⁶ Campbell, E.E.B.⁷

10
- 25844496187
- J. Cao, Q. Wang and H. Dai: Nat. Mater. 4 (2005) 745.
- (2005) Nat. Mater. , vol.4 , pp. 745
- Cao, J.¹ Wang, Q.² Dai, H.³

11
- 0042322763
- M. Liebau, E. Unger, G. Duesberg, A. Graham, R. Seidel, F. Kreupl and W. Hoenlein: Appl. Phys. A 77 (2003) 731.
- (2003) Appl. Phys. A , vol.77 , pp. 731
- Liebau, M.¹ Unger, E.² Duesberg, G.³ Graham, A.⁴ Seidel, R.⁵ Kreupl, F.⁶ Hoenlein, W.⁷

12
- 0141741678
- R. Seidel, M. Liebau, G. S. Duesberg, F. Kreupl, E. Unger, A. P. Graham, W. Hoenlein and W. Pompe: Nano Lett. 3 (2003) 965.
- (2003) Nano Lett. , vol.3 , pp. 965
- Seidel, R.¹ Liebau, M.² Duesberg, G.S.³ Kreupl, F.⁴ Unger, E.⁵ Graham, A.P.⁶ Hoenlein, W.⁷ Pompe, W.⁸

13
- 0042991275
- A. Javey, J. Guo, Q. Wang, M. Lundstrom and H. Dai: Nature 424 (2003) 654.
- (2003) Nature , vol.424 , pp. 654
- Javey, A.¹ Guo, J.² Wang, Q.³ Lundstrom, M.⁴ Dai, H.⁵

14
- 0344519544
- U. Hübner, W. Morgenroth, H.-G. Meyer, T. Sulzbach, B. Brendel and W. Mirandé: Appl. Phys. A 76 (2003) 913.
- (2003) Appl. Phys. A , vol.76 , pp. 913
- Hübner, U.¹ Morgenroth, W.² Meyer, H.-G.³ Sulzbach, T.⁴ Brendel, B.⁵ Mirandé, W.⁶

15
- 0035957717
- P. G. Collins, M. S. Arnold and P. Avouris: Science 292 (2001) 706.
- (2001) Science , vol.292 , pp. 706
- Collins, P.G.¹ Arnold, M.S.² Avouris, P.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.