MEMS applications using diamond thin films

Solid State Technology

Volumn 49, Issue 4, 2006, Pages

  Huff, Michael A ^a,d   Aidala, Dwain A ^b   Butler, James E ^c  

^a MEMS and Nonotechnology Exchange   (United States)

^b sp3 Diamond Technologies Inc   (United States)

^c NAVAL RESEARCH LABORATORY   (United States)

^d MEMS and Nanotechnology Exchange   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND THIN FILMS; LARGE-AREA SUBSTRATES;

DIAMONDS; NANOTECHNOLOGY; SILICON; THIN FILMS;

MICROELECTROMECHANICAL DEVICES;

EID: 33646743014     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Review

References (4)

1. J. Philip, P. Hess, T. Feygelson, I.E. Butler, S. Chattopadhyay, K.H. Chen, L.C. Chen, "Elastic, Mechanical, and Thermal Properties of Nanocrystalline Diamond Films," Journal of Applied Physics, Vol. 93, No. 4, Feb 15, 2003, p. 2164.
2. L. Sekaric, J. M.Parpia, H.G. Craighead, T. Feygelson, B.H. Houston, J.E. Butler, "Nanomechanical Resonant Structures in Nanocrystalline Diamond," Applied Physics Letters, Vol. 81, No. 23, Dec 2, 2002, p. 4455.
3. J. Wang, J. E.Butler, T. Feygelson, T.-C. C. Nguyen,"1.51-GHz Nanocrystalline Diamond Micromechanical Disk Resonator with Material-mismatched Isolating Support," Proceedings, 17th Int. IEEE Micro Electro Mechanical Systems Conf., Maastricht, The Netherlands, Jan. 25-29, 2004, p. 641.
4. Interested parties should contact the MEMS Exchange at http://www.mems-exchange.org.