Novel optical-waveguide sensing platform based on input grating coupler

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6123, Issue , 2006, Pages

  Grego, Sonia ^a   Naskar, Sudipto ^a   Patel, Aarish M ^a   Huffman, Alan ^a   Bower, Christopher A ^a   Stoner, Brian R ^a  

^a RTI INTERNATIONAL   (United States)

Author keywords

Grating; Nano imprint lithography; Optical waveguide; Sensor; Silicon oxynitride

Indexed keywords

DIFFRACTION GRATINGS; LITHOGRAPHY; OPTICAL SENSORS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SELF ASSEMBLY; WAVEGUIDE COUPLERS;

LABEL-FREE DETECTION; NANO-IMPRINT LITHOGRAPHY; SILICON OXYNITRIDE;

OPTICAL WAVEGUIDES;

EID: 33646722426     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.646302     Document Type: Conference Paper

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