Grating couplers for dual-channel thin-film waveguide sensors produced by transmission photolithography

Journal of Biomedical Optics

Volumn 2, Issue 4, 1997, Pages 350-357

  Plowman, Thomas E ^a   Peters, Charles R ^b   Monty Reichert, W ^a  

^a Duke University   (United States)

^b MCNC   (United States)

Author keywords

Affinity sensor; Grating efficiency; Photolithography; Planar integrated optical waveguide

Indexed keywords

BOVINAE;

BIOASSAY; BIOSENSORS; DIFFRACTION GRATINGS; EFFICIENCY; PHOTOLITHOGRAPHY; PROTEINS; THIN FILMS;

AFFINITY SENSOR; ANALYTE; BOVINE SERUM ALBUMIN; PLANAR INTEGRATED OPTICAL WAVEGUIDE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON OXYNITRIDE; TRANSMISSION PHOTOLITHOGRAPHY;

OPTICAL WAVEGUIDES;

EID: 0031251354     PISSN: 10833668     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.281501     Document Type: Article

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