Optimal actuation of micro-cantilevers by laser radiation pressure

Electronics Letters

Volumn 42, Issue 10, 2006, Pages 580-581

  Pal, S ^a   Ghosh, A K ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; LASER APPLICATIONS; RADIATION EFFECTS;

LASER RADIATION PRESSURE; MICRO-CANTILEVERS;

LASER OPTICS;

EID: 33646672668     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20060423     Document Type: Article

References (7)

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3. Sulfridge, M.: ' Optical actuation of a bistable MEMS ', J. Microelectromech. Syst., 2002, 11, (5), p. 574-583
4. Dragoman, M., and Dragoman, D.: ' Optical actuation of micromechanical tunneling structures ', 22nd Int. Annual Conf. Semiconductors, Sinaia, Romania 1999, p. 451-455
5. Dragoman, D., and Dragoman, M.: ' Optical actuation of micromechanical tunneling structures with applications in spectrum analysis and optical computing ', Appl. Opt., 1999, 38, (32), p. 6773-6778
6. Nandanpawar, M.L., and Rajagopalan, S.: ' Wachtman's equation and temperature dependence of bulk moduli in solids ', J. Appl. Phys., 1978, 49, p. 3976-3979
7. Bao, M.: ' Analysis and design principles of MEMS devices ', (Elsevier, New York 2005)