Optical actuation of micromechanical tunneling structures

Proceedings of the International Semiconductor Conference, CAS

Volumn 2, Issue , 1999, Pages 451-454

  Dragoman, M ^a   Dragoman, D ^a  

^a National Research and Development   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; ELECTRIC CURRENTS; ELECTRON TUNNELING; MICROMACHINING; PRESSURE EFFECTS;

MICROMECHANICAL TUNNELING STRUCTURES; OPTICAL ACTUATION;

MICROACTUATORS;

EID: 0033341550     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (8)