H2S sensing property of porous SnO2 sputtered films coated with various doping films

Vacuum

Volumn 80, Issue 7 SPEC. ISS., 2006, Pages 723-725

  Jin, Chengji ^a   Yamazaki, Toshinari ^a   Ito, Koji ^a   Kikuta, Toshio ^a   Nakatani, Noriyuki ^a  

^a UNIVERSITY OF TOYAMA   (Japan)

Author keywords

Doping film; Hydrogen sulfide gas; Porosity; Sputtering; Tin oxide

Indexed keywords

DOPING (ADDITIVES); MAGNETRON SPUTTERING; POROSITY; POROUS MATERIALS; TIN COMPOUNDS; X RAY DIFFRACTION;

DOPING FILM; GAS PRESSURES; HYDROGEN SULFIDE GAS; TIN OXIDE;

THIN FILMS;

EID: 33646590298     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.11.002     Document Type: Article

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