Energetic negative ions in titanium oxide deposition by reactive sputtering in Ar/O2

Vacuum

Volumn 80, Issue 7 SPEC. ISS., 2006, Pages 654-657

  Tominaga, Kikuo ^a   Ito, Daisuke ^a   Miyamoto, Yoshinori ^a  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

Author keywords

Energetic negative oxygen ions; Reactive sputtering; TiO2

Indexed keywords

COALESCENCE; ELECTRODEPOSITION; MAGNETIC FLUX; MAGNETRON SPUTTERING; PARTIAL PRESSURE; TITANIUM OXIDES;

ENERGETIC NEGATIVE OXYGEN IONS; OXYGEN FLUX; REACTIVE SPUTTERING;

NEGATIVE IONS;

EID: 33646578510     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.11.007     Document Type: Article

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