Energetic oxygen ions in zro2 deposition by reactive sputtering of zr

Vacuum

Volumn 66, Issue 3-4, 2002, Pages 279-284

  Tominaga, Kikuo ^a   Kikuma, Takuya ^a   Kusaka, Kazuya ^a   Hanabusa, Takao ^a  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

Author keywords

Energetic oxygen; Film degradation; Zr oxides

Indexed keywords

IONS; MAGNETIC FLUX; OXYGEN; PHOTOEMISSION; ZIRCONIA;

ENERGETIC OXYGEN;

SPUTTER DEPOSITION;

EID: 0037136177     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00155-0     Document Type: Article

References (6)