Low-temperature preparation of crystallized zirconia films by ECR plasma MOCVD

Materials Research Society Symposium Proceedings

Volumn 890, Issue , 2006, Pages 183-188

  Masumoto, Hiroshi ^a   Goto, Takashi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; ELECTRONS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PLASMAS; QUARTZ; THERMAL EFFECTS; THIN FILMS;

CRYSTALLIZED ZIRCONIA FILMS; ECR PLASMA; MONOCLINIC ZIRCONIA FILMS; POLYAMIDOIMIDE SUBSTRATES;

ZIRCONIA;

EID: 33646457215     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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