Defect content evaluation in single-crystal AlN wafers

Materials Research Society Symposium Proceedings

Volumn 892, Issue , 2006, Pages 763-768

  Bondokov, Robert T ^a   Morgan, Kenneth E ^a   Shetty, Raj ^a   Liu, Wayne ^a   Slack, Glen A ^a   Goorsky, Mark ^b   Schowalter, Leo J ^a  

^a Crystal IS Inc   (United States)

^b University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CONDENSATION; CRYSTAL DEFECTS; CRYSTALLOGRAPHY; OPTICAL MICROSCOPY; SINGLE CRYSTALS; SUBLIMATION;

BULK CRYSTALS; PHOTONICS; SUBLIMATION-RECONDENSATION TECHNIQUE;

ALUMINUM NITRIDE;

EID: 33646442032     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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