RF power and SiOxCyHz deposition efficiency in TEOS/O2 discharges for the corrosion protection of magnesium alloys

Surface and Coatings Technology

Volumn 200, Issue 22-23 SPEC. ISS., 2006, Pages 6618-6622

  Voulgaris, Ch ^a   Amanatides, E ^a   Mataras, D ^a   Grassini, S ^b   Angelini, E ^b   Rosalbino, F ^b  

^a UNIVERSITY OF PATRAS   (Greece)

^b POLITECNICO DI TORINO   (Italy)

Author keywords

Magnesium; Plasma; Silicon oxide; TEOS

Indexed keywords

CORROSION RESISTANCE; DEPOSITION; MAGNESIUM ALLOYS; PLASMA DIAGNOSTICS; SILICON COMPOUNDS;

DEPOSITION EFFICIENCY; SILICON OXIDE;

CORROSION PROTECTION;

CORROSION PROTECTION; CORROSION RESISTANCE; DEPOSITION; MAGNESIUM ALLOYS; PLASMA DIAGNOSTICS; SILICON COMPOUNDS;

EID: 33646134611     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.11.058     Document Type: Article

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