Advancing three-dimensional MEMS by complimentary laser micro manufacturing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6109, Issue , 2006, Pages

  Palmer, Jeremy A ^a   Williams, John D ^a   Lemp, Tom ^a   Lehecka, Tom M ^b   Medina, Francisco ^c   Wicker, Ryan B ^c  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

^c UNIVERSITY OF TEXAS AT EL PASO   (United States)

Author keywords

Femtosecond laser; LIGA; Micro stereolithography

Indexed keywords

ASPECT RATIO; LASERS; MICROMACHINING; POLYMETHYL METHACRYLATES; PRODUCT DEVELOPMENT; X RAY LITHOGRAPHY;

FEMTOSECOND LASERS; LIGA; MICRO STEREOLITHOGRAPHY; THROUGHPUT ADVANTAGES;

MICROELECTROMECHANICAL DEVICES;

EID: 33646069963     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.641244     Document Type: Conference Paper

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