Simulation software for designing electron and ion beam equipment

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 994-1002

  Munro, E ^a   Rouse, J ^a   Liu, H ^a   Wang, L ^a   Zhu, X ^a  

^a Munro's Electron Beam Software Ltd   (United Kingdom)

Author keywords

Aberration correctors; Charged particle optics; Coulomb interactions; Electron energy filters; Electron guns; Electron mirrors; LEEM; Magnetic prisms; Multipole lenses

Indexed keywords

ABERRATIONS; COMPUTER SIMULATION; COMPUTER SOFTWARE; ELECTRON GUNS; ELECTRON MICROSCOPY; NANOTECHNOLOGY; SOFTWARE ENGINEERING;

ABERRATION CORRECTORS; CHARGED PARTICLE OPTICS; COULOMB INTERACTIONS; LEEM; MULTIPOLE LENSES;

ION BEAMS;

EID: 33646062288     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.076     Document Type: Article

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