Computer aided design and analysis of imaging energy filters with inhomogeneous bending magnets

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 3034-3041

  Munro, Eric ^a   Rouse, John ^a  

^a Munro's Electron Beam Software Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SOFTWARE; CURRENT DENSITY; ELECTRON ENERGY LEVELS; IMAGING TECHNIQUES; MAGNETIC FIELD EFFECTS; OPTICAL PROPERTIES; TRANSMISSION ELECTRON MICROSCOPY;

MAGNETIC IMAGING ENERGY FILTERS;

MAGNETIC FILTERS;

EID: 0034316885     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1319841     Document Type: Article

References (11)

1. O. L. Krivanek, A. J. Gubbens, and N. Dellby, Microsc. Microanal. Microstruct. 2, 315 (1991).
2. H. Rose and D. Krahl, in Energy-Filtering Transmission Electron Microscopy, edited by L. Reimer (Springer, Berlin, 1995), pp. 43-149.
3. K. Tsuno and E. Munro, Rev. Sci. Instrum. 68, 109 (1997).
4. S. Lanio, H. Rose, and D. Krahl, Optik (Stuttgart) 73, 56 (1986).
5. S. Uhlemann and H. Rose, Optik (Stuttgart) 96, 163 (1994).
6. S. Lanio, Optik (Stuttgart) 73, 99 (1986).
7. H. Rose, Optik (Stuttgart) 51, 15 (1978).
8. G. Zanchi, J. Ph. Perez, and J. Sevely, Optik (Stuttgart) 43, 495 (1975).
9. J. Rouse, E. Munro, and K. Tsuno, Proc. SPIE 3155, 193 (1997).
10. MO-3D User Manual, MEBS Ltd. (April 2000).
11. E. Plies, Optik (Stuttgart) 38, 502 (1973).