Fabrication of 3-D photonic crystals by two-step dry etching of layered media

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6110, Issue , 2006, Pages

  Srinivasan, Pradeep ^a   Rumpf, Raymond C ^a   Johnson, Eric G ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM GALLIUM ARSENIDE (ALGAAS); BORON-TRI-CHLORIDE CHEMISTRY; GALLIUM ARSENIDE (GAAS); SEMICONDUCTOR HETERO-STRUCTURE;

ARRAYS; ELECTROMAGNETIC WAVES; ETCHING; GALLIUM COMPOUNDS; HETEROJUNCTIONS; MOLECULAR BEAM EPITAXY; PHOTONS; ROBUSTNESS (CONTROL SYSTEMS); THREE DIMENSIONAL;

CRYSTALLOGRAPHY;

EID: 33646060729     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.646461     Document Type: Conference Paper

References (12)

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