Nanoscale imaging with a portable field emission scanning electron microscope

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 762-766

  Khursheed, Anjam ^a   Nelliyan, Karuppiah ^b   Ding, Yu ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b Mini Electron Beam Instruments   (Singapore)

Author keywords

Immersion electron lens; Landing energy; SEM

Indexed keywords

COMPUTER SIMULATION; LENSES; OPTICAL RESOLVING POWER; SCANNING ELECTRON MICROSCOPY;

IMAGE RESOLUTION; IMMERSION ELECTRON LENS; LANDING ENERGY; NANOSCALE IMAGES;

IMAGING SYSTEMS;

EID: 33646040411     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.003     Document Type: Article

References (4)

1. Mini Electron Beam Instruments (MEBI), 247A Pasir Panjang Road, Chuville, Singapore 118607.
2. Khursheed A. Aberration characteristics of immersion lenses for LVSEM. Ultramicroscopy 93 (2002) 331-338
3. Khursheed A. The Finite Element Method in Charged Particle Optics (1999), Kluwer Academic Publishers, Boston, USA (Chapters 4, 7-9)
4. E. Munro, Simulation of discrete coulomb interactions in high-current projection and multi-beam columns, in: Charged Particle Optics IV, Proceedings of SPE 1999, vol. 3777, pp. 215-227.