Micro-gear fabrication using optical projection lithography on copper-clad plastic substrates and electroplating of nickel

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1316-1320

  Horiuchi, Toshiyuki ^a   Furuuchi, Yusuke ^a   Nakamura, Ryota ^a   Hirota, Katsunori ^a  

^a TOKYO DENKI UNIVERSITY   (Japan)

Author keywords

Copper clad plastic substrate; Micro gear; Nickel electroplating; Optical projection lithography

Indexed keywords

DISSOLUTION; ELECTROPLATING; LITHOGRAPHY; NICKEL COMPOUNDS; SUBSTRATES;

COPPER-CLAD PLASTIC SUBSTRATE; MICRO-GEAR; NICKEL ELECTROPLATING; OPTICAL PROJECTION LITHOGRAPHY;

PLASTICS;

EID: 33646034037     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.083     Document Type: Article

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