Novel plasma enhanced bulk micromachining process for MEMS

ASDAM 1998 Conference Proceedings: 2nd International Conference on Advanced Semiconductor Devices And Microsystems

Volumn 1998-October, Issue , 1998, Pages 315-318

  Valland, Burkhard E ^a   Shi, Feng ^a   Hudek, Peter ^b   Rangelow, Ivo W ^a  

^a UNIVERSITY OF KASSEL   (Germany)

^b INSTITUTE OF CHEMISTRY   (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

BATCH DATA PROCESSING; COMPOSITE MICROMECHANICS; MICROMACHINING; MICROSYSTEMS; PLASMA ETCHING; REACTIVE ION ETCHING; SEMICONDUCTOR DEVICES; SILICON WAFERS;

BULK SILICON MICROMACHINING PROCESS; BULK- MICROMACHINING; DIFFERENT STRUCTURE; DRY ETCHING PROCESS; MASK ALIGNMENT; MASS PRODUCTION; MICROMECHANICAL DEVICE; TECHNOLOGY USE;

DRY ETCHING;

EID: 33646031602     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ASDAM.1998.730224     Document Type: Conference Paper

References (10)

1. Roger T. Howe, Surface micromachining for microsensors and microactuators, J. Vac. Sci. Technol. B 6 (6) Nov/Dec 1988.
2. Ernest J. Garcia, and Jeffry J. Sniegowski. Surface micromachined microengine as the driver for micromechanical gears, Transducers '95 • Eurosensors IX, pp. 365-368.
3. Roya Maboudian, et a!., Critical Review: Adhesion in surface micromechanical structures, J. Vac. Sci Technol. B 15(1), Jan/Feb 1997.
4. Takeshi Abe, et al., Effects of elevated temperature treatments in microstructure release procedures, Journal of Microelectromechanical systems, Vol. 4, No. 2, June 1995.
5. Z. Lisa Zhang, et al, Submicron, movable gallium arsenide mechanical structures and actuators, Micro Electromechanical Systems '92, Travemünde.
6. Kevin A. Shaw, et al., SCREAM I: A single mask, single-crystal silicon process for microelectromechnical structures, 1993 IEEE.
7. Y. X. Li, et al, Fabrication of a Single Crystalline Silicon Capacitive Lateral Accelerometer using micromachining based on single step plasma etching, 1995 IEEE.
8. Ivo W. Rangelow, Deep Etching of Silicon, 1996, ISBN 83-7085-254-8.
9. V. P. Jaeklin, et al., Micromechanical comb actuators with low driving voltage, Actuator 92, Bremen.
10. Burkhard Volland, Elektrostatisch angetriebene Mikroaktuatoren, Diplomarbeit, Kassel 1997.