Theoretical and experimental performance of a high frequency micropump

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn 7 MEMS, Issue , 2005, Pages 711-720

  Astle, Aaron ^a   Kim, Hanseup ^a   Bernal, Luis P ^a   Najafi, Khalil ^a   Washabaugh, Peter D ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MONITORING SYSTEM; FREQUENCY MICROPUMP; MICHIGAN'S WIRELESS INTEGRATED MICRO-SYSTEMS;

FABRICATION; MICROELECTROMECHANICAL DEVICES; MOBILE COMPUTING; MONITORING; PERFORMANCE; PRESSURE CONTROL;

PUMPS;

EID: 33646000579     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2005-81626     Document Type: Conference Paper

References (6)

1. E. T. Zellers, et al., 2004, Hilton Head' 04, Hilton Head Island, SC, USA, pp. 61-66.
2. Cleopatra Cabuz, William R. Herb, Eugen I. Cabuz, Son Thai Lu, 2001, "THE DUAL DIAPHRAGM PUMP", IEEE, 0-7803-5998-4, pp 519-522.
3. Astle A., A. Paige, L. P. Bernal, J. Munfakh, H. Kim, K. Najafi, 2002, "Analysis and design of multistage electrostatically-actuated micro-vacuum pumps," Proceedings of 2002 ASME International Mechanical Engineering Congress, November 17-22, New Orleans, LA, Paper number IMECE2002-39308.
4. Astle A., L. P. Bernal, H. Kim, K. Najafi, 2003, "Dynamic Modeling and design of a high Frequency Micro Vacuum Pump," Proceedings of IMECE2003 2003 ASME International Mechanical Engineering Congress & Exposition Washington, DC, November 15-21.
5. Hanseup Kim, Khalil Najafi, Aaron A. Astle, Luis P. Bernal, and Peter D. Washabaugh, 2005, "Fabrication and performance of a dual-electrode electrostatic peristaltic gas micropump", 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS '05).
6. Hanseup S. Kim and Khalil Najafi, 2003, "Wafer bonding using Parylene and wafer-level transfer of freestanding Parylene membranes", 12th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers '03).