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Volumn 8, Issue 1, 2006, Pages 363-367

Diode pumped Q-switched Nd:YAG laser at 1064 nm with nearly diffraction limited output beam for precise micromachining of natural diamond for micro electro mechanical systems (MEMS) applications

Author keywords

Diode pumped Nd:YAG laser; Micro electro mechanical systems; Q Switched Nd:YAG laser; Single crystal diamond; V shaped groove; Weight loss; Wide band gap (WBG) Materials

Indexed keywords

DIAMONDS; DIODES; ENERGY GAP; MECHANICS; MORPHOLOGY; NATURAL GEMS; NEODYMIUM LASERS; PUMPING (LASER); Q SWITCHING; SINGLE CRYSTALS; SURFACE MORPHOLOGY; WIDE BAND GAP SEMICONDUCTORS; YTTRIUM ALUMINUM GARNET;

EID: 33645979977     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (6)

References (19)
  • 18
    • 0003161761 scopus 로고
    • Silicon micromachining for resonator fabrication
    • Boston, MA, June 1-3
    • R. T. Howe, "Silicon micromachining for resonator fabrication", Proc. IEEE Frequency Control Symp, Boston, MA, June 1-3, 2 (1994).
    • (1994) Proc. IEEE Frequency Control Symp , pp. 2
    • Howe, R.T.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.