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Volumn 8, Issue 1, 2006, Pages 363-367
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Diode pumped Q-switched Nd:YAG laser at 1064 nm with nearly diffraction limited output beam for precise micromachining of natural diamond for micro electro mechanical systems (MEMS) applications
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Author keywords
Diode pumped Nd:YAG laser; Micro electro mechanical systems; Q Switched Nd:YAG laser; Single crystal diamond; V shaped groove; Weight loss; Wide band gap (WBG) Materials
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Indexed keywords
DIAMONDS;
DIODES;
ENERGY GAP;
MECHANICS;
MORPHOLOGY;
NATURAL GEMS;
NEODYMIUM LASERS;
PUMPING (LASER);
Q SWITCHING;
SINGLE CRYSTALS;
SURFACE MORPHOLOGY;
WIDE BAND GAP SEMICONDUCTORS;
YTTRIUM ALUMINUM GARNET;
DIODE PUMPED ND: YAG;
MICRO ELECTRO MECHANICAL SYSTEM;
Q SWITCHED ND:YAG LASER;
SINGLE CRYSTAL DIAMOND;
V-SHAPED GROOVES;
WEIGHT LOSS;
WIDE-BAND-GAP;
MEMS;
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EID: 33645979977
PISSN: 14544164
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (6)
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References (19)
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