The effect of thickness on the Bi-Ge-Sb-Te films for reversible phase-change optical recording

Materials Science and Engineering: B

Volumn 129, Issue 1-3, 2006, Pages 116-120

  Lin, Su Shia ^a  

^a CHIENKUO TECHNOLOGY UNIVERSITY   (Taiwan)

Author keywords

Bi Ge Sb Te film; dc Magnetron sputtering; Optical recording; Thickness

Indexed keywords

BISMUTH ALLOYS; JITTER; MAGNETRON SPUTTERING; OPTICAL RECORDING; SURFACE ROUGHNESS;

BI-GE-SB-TE FILM; DC MAGNETRON SPUTTERING; LOWEST JITTER VALUE; THICKNESS;

THIN FILMS;

EID: 33645935998     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2005.12.025     Document Type: Article

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