Electroless, electrolytic and galvanic copper deposition with the Scanning Electrochemical Microscope (SECM)

Zeitschrift fur Physikalische Chemie

Volumn 220, Issue 4, 2006, Pages 393-406

  Radtke, Valentin ^a   Heß, Christian ^a   Souto, Ricardo M ^b   Heinze, Jürgen ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

^b UNIVERSIDAD DE LA LAGUNA   (Spain)

Author keywords

Copper Deposition; Electrochemistry; Scanning Electrochemical Microscopy; SECM; Tip Induced Microgalvanic Cell

Indexed keywords

COPPER METALLOGRAPHY; DEPOSITION; ELECTROCHEMISTRY; METAL IONS; MICROSTRUCTURE; SCANNING; SCANNING ELECTRON MICROSCOPY; SCANNING PROBE MICROSCOPY; SUBSTRATES;

COPPER DEPOSITION; ELECTROCHEMICAL REACTIONS; ELECTROLESS COPPER DEPOSITION; SCANNING ELECTROCHEMICAL MICROSCOPES; SCANNING ELECTROCHEMICAL MICROSCOPY; SECM; SEMICONDUCTING SURFACES; TIP-INDUCED;

ANALYTIC EQUIPMENT;

EID: 33645935066     PISSN: 09429352     EISSN: None     Source Type: Journal    
DOI: 10.1524/zpch.2006.220.4.393     Document Type: Article

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