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Applied Physics Letters

Volumn 88, Issue 14, 2006, Pages

Surface stress control using ultraviolet light irradiation of plasma-polymerized thin films

(6) Igarashi, Shinichi d Itakura, Akiko N d Kitajima, Masahiro a,b Chifen, Anye N c Förch, Renate c Berger, Rüdiger c

a NATIONAL INSTITUTE FOR MATERIALS SCIENCE (Japan)

b UNIVERSITY OF TSUKUBA (Japan)

c MAX PLANCK INSTITUTE FOR POLYMER RESEARCH (Germany)

d NONE

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; CROSSLINKING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; IRRADIATION; OXIDATION; PLASMA POLYMERIZATION; STRESS CONCENTRATION; SURFACE PHENOMENA; SURFACE PROPERTIES; ULTRAVIOLET RADIATION;

PLASMA POLYMERS; POLYMERIC FILMS; STRESS CONTROL; ULTRAVIOLET LIGHTS;

THIN FILMS;

EID: 33645667558 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2183807 Document Type: Article

Times cited : (10)

References (12)

1
- 4243532091
- Y. Uesugi-Saitow and M. Yata, Phys. Rev. Lett. 88, 256104 (2002).
- (2002) Phys. Rev. Lett. , vol.88 , pp. 256104
- Uesugi-Saitow, Y.¹ Yata, M.²

2
- 0346846633
- M. Yata, Y. Uesugi-Saitow, M. Kitajima, A. Kubo, and V. Korsukov, Phys. Rev. Lett. 91, 206103 (2003).
- (2003) Phys. Rev. Lett. , vol.91 , pp. 206103
- Yata, M.¹ Uesugi-Saitow, Y.² Kitajima, M.³ Kubo, A.⁴ Korsukov, V.⁵

3
- 33645685035
- S. Igarashi, A. N. Itakura, M. Kitajima, S. Nakano, S. Muto, T. Tanabe, H. Yamamoto, and K. Hojou, J. Surf. Sci. Soc. Jpn. 25, 562 (2004) (in Japanese).
- (2004) , pp. 562
- Igarashi, S.¹ Itakura, A.N.² Kitajima, M.³ Nakano, S.⁴ Muto, S.⁵ Tanabe, T.⁶ Yamamoto, H.⁷ Hojou, K.⁸

4
- 18144435008
- Z. Zhang, Q. Chen, W. Knoll, and R. Förch, Surf. Coat. Technol. 174-175, 588 (2003).
- (2003) Surf. Coat. Technol. , vol.174-175 , pp. 588
- Zhang, Z.¹ Chen, Q.² Knoll, W.³ Förch, R.⁴

5
- 0001467023
- M. T. van Os, B. Menges, R. Foerch, G. J. Vancso, and W. Knoll, Chem. Mater. 11, 3252 (1999).
- (1999) Chem. Mater. , vol.11 , pp. 3252
- Van Os, M.T.¹ Menges, B.² Foerch, R.³ Vancso, G.J.⁴ Knoll, W.⁵

6
- 0030769421
- R. Berger, E. Delamarche, H. P. Lang, C. Gerber, J. K. Gimzewski, E. Meyer, and H.-J. Güntherodt, Science 276, 2021 (1997).
- (1997) Science , vol.276 , pp. 2021
- Berger, R.¹ Delamarche, E.² Lang, H.P.³ Gerber, C.⁴ Gimzewski, J.K.⁵ Meyer, E.⁶ Güntherodt, H.-J.⁷

7
- 0001022448
- T. Miyatani and M. Fujihira, J. Appl. Phys. 81, 7099 (1997).
- (1997) J. Appl. Phys. , vol.81 , pp. 7099
- Miyatani, T.¹ Fujihira, M.²

8
- 0039436923
- T. Narushima, A. N. Itakura, T. Kawabe, and M. Kitajima, Appl. Phys. Lett. 79, 605 (2001).
- (2001) Appl. Phys. Lett. , vol.79 , pp. 605
- Narushima, T.¹ Itakura, A.N.² Kawabe, T.³ Kitajima, M.⁴

9
- 79956055212
- A. N. Itakura, R. Berger, T. Narushima, and M. Kitajima, Appl. Phys. Lett. 80, 3712 (2002).
- (2002) Appl. Phys. Lett. , vol.80 , pp. 3712
- Itakura, A.N.¹ Berger, R.² Narushima, T.³ Kitajima, M.⁴

10
- 0034245639
- A. T. A. Jenkins, J. Hu, Y. Z. Wang, S. Schiller, R. Foerch, and W. Knoll, Langmuir 16, 6381 (2000).
- (2000) Langmuir , vol.16 , pp. 6381
- Jenkins, A.T.A.¹ Hu, J.² Wang, Y.Z.³ Schiller, S.⁴ Foerch, R.⁵ Knoll, W.⁶

11
- 0000073841
- G. G. Stoney, Proc. R. Soc. London, Ser. A 82, 172 (1909).
- (1909) Proc. R. Soc. London, Ser. A , vol.82 , pp. 172
- Stoney, G.G.¹

12
- 33645660306
- S. Igarashi, A. N. Itakura, M. Toda, M. Kitajima, L. Chu, A. N. Chifen, R. Förch, and R. Berger, Sens. Actuators B (2006).
- (2006) Sens. Actuators B
- Igarashi, S.¹ Itakura, A.N.² Toda, M.³ Kitajima, M.⁴ Chu, L.⁵ Chifen, A.N.⁶ Förch, R.⁷ Berger, R.⁸

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