Implementing Thermal Laser and Photoelectric Laser Stimulation in a failure analysis laboratory

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

Volumn 2003-January, Issue , 2003, Pages 210-212

  Firiti, A ^a   Lewis, D ^b   Beaudoin, F ^c   Perdu, P ^c   Haller, G ^a   Danto, Y ^a  

^a STMICROELECTRONICS   (France)

^b UNIVERSITÉ DE BORDEAUX   (France)

^c CNES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; PHOTOELECTRICITY;

DEFECT LOCALIZATIONS; LASER STIMULATION; THERMAL LASER STIMULATIONS;

FAILURE ANALYSIS;

EID: 33645607916     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IPFA.2003.1222768     Document Type: Conference Paper

References (5)

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2. F. Beaudoin, P. Perdu, I Desplats, B. Doehe, A. Wislez, T. Beauchene, D. Lewis, D. Carisetti, D. Trémouille, M. Bafleur, Leser Beam Defect Localization in ICs. ISTFA 2002.. 543-551.
3. Stamm U, Bergner H, Hempem K and Krause A. Techniques for Picosecond OBIC Measurements on ICs, Microelectronic Engineering., vol 16, 275-286, 1992
4. D. M. Chin et al., single contact optical beam induced currents (SCOBIC)-A new failure analysis technique. IRPS 2000
5. Cole El., Soden J.M., Rife J.L.,Barton D.L, Henderson C.L., Novel failure analysis techniques using photon probing with a scanning optical microscope, proc of TRPS, pp. 388-398, 1994.