Development of a small two axis spherical motor type laser tracker with submicron measurement accuracy

IEEJ Transactions on Sensors and Micromachines

Volumn 126, Issue 4, 2006, Pages

  Yano, Tomoaki ^a   Takatsuji, Toshiyuki ^a   Osawa, Sonko ^a   Suzuki, Takeo ^b   Motomura, Yoichi ^b   Itabe, Tadao ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b YASKAWA ELECTRIC CORPORATION   (Japan)

Author keywords

3D Position measurement; Actuator; Laser Tracker; Multi Degree of Freedom; Spherical Motor; Submicron

Indexed keywords

ACTUATORS; ARTIFICIAL INTELLIGENCE; DEGREES OF FREEDOM (MECHANICS); ERROR ANALYSIS; INDUSTRIAL ROBOTS; LASERS; MICROMACHINING;

3D POSITION MEASUREMENT; LASER TRACKER; MULTI DEGREE OF FREEDOM; SPHERICAL MOTORS; SUBMICRON;

POSITION MEASUREMENT;

EID: 33645567688     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.126.144     Document Type: Article

References (13)

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