Pattern formation by erosion sputtering on GaSb: Transition from dot to ripple formation and influence of impurities

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 2, 2006, Pages 582-586

  Allmers, T ^a   Donath, M ^a   Rangelov, G ^a  

^a UNIVERSITY OF MÜNSTER   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; ANNEALING; ANTIMONY ALLOYS; CRYSTALLOGRAPHY; ELECTRON DIFFRACTION; EROSION; IMPURITIES; NANOSTRUCTURED MATERIALS; NUCLEATION; SPUTTERING; SURFACE PROPERTIES;

IRREVERSIBLE AMORPHIZATION; MODERATE ANNEALING; PATTERN FORMATION; RIPPLE FORMATION;

GALLIUM ALLOYS;

EID: 33645548733     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2170100     Document Type: Article

References (27)

1. M. Navez, C. Saella, and D. Chaperot, C. R. Acad. Sci. 254, 240 (1962).
2. S. Facsko, T. Dekorsy, C. Koerdt, C. Trappe, H. Kurz, A. Vogt, and H. L. Hartnagel, Science 285, 1551 (1999).
3. F. Frost, A. Schindler, and F. Bigl, Phys. Rev. Lett. 85, 4116 (2000).
4. S. Facsko, H. Kurz, and T. Dekorsy, Phys. Rev. B 63, 165329 (2001).
5. F. Frost, B. Ziberi, T. Höche, and B. Rauschenbach, Nucl. Instrum. Methods Phys. Res. B 216, 9 (2004).
6. F. Frost and B. Rauschenbach, Appl. Phys. A: Mater. Sci. Process. 77, 1 (2003).
7. R. Bradley and J. Harper, J. Vac. Sci. Technol. A 6, 2390 (1988).
8. P. Sigmund, Phys. Rev. 184, 383 (1969).
9. R. Cuerno and A.-L. Barabasi, Phys. Rev. Lett. 74, 4746 (1995).
10. Y. Kuramoto and T. Tsuzuki, Prog. Theor. Phys. 55, 356 (1977).
11. G. Sivashinsky, Acta Astron. 6, 569 (1979).
12. M. Makeev and A.-L. Barabasi, Appl. Phys. Lett. 71, 2800 (1997).
13. B. Kahng, H. Jeong, and A.-L. Barabasi, Appl. Phys. Lett. 78, 805 (2001).
14. S. Facsko, T. Bobek, A. Stahl, H. Kurz, and T. Dekorsy, Phys. Rev. B 69, 153412 (2004).
15. M. Paniconi and K. Elder, Phys. Rev. E 56, 2713 (1997).
16. S. Vogel and S. Linz, Phys. Rev. B 72, 035416 (2005).
17. S. Vogel and S. J. Linz (unpublished).
18. R. Cuerno (private communication).
19. T. Bobek (private communication).
20. M. A. Makeev, R. Cuerno, and A.-L. Barabasi, Nucl. Instrum. Methods Phys. Res. B 197, 185 (2002).
21. S. Rossnagel and R. Robinson, J. Vac. Sci. Technol. 20, 195 (1982).
22. Y. Homma, J. Vac. Sci. Technol. A 5, 321 (1987).
23. S. Rossnagel and R. Robinson, J. Vac. Sci. Technol. 20, 336 (1982).
24. I. H. Wilson, J. Belson, and O. Auciello in Ion Bombardment Modification of Surfaces, edited by, O. Auciello, and, R. Kelly, (Elsevier, New York, 1984).
25. S. Facsko, T. Bobek, H. Kurz, T. Dekorsy, S. Kyrsta, and R. Cremer, Appl. Phys. Lett. 80, 130 (2002).
26. S. Facsko, T. Bobek, T. Dekorsy, and H. Kurz, Phys. Status Solidi B 224, 537 (2001).
27. Selbstorganisation von periodischen Nanostrukturen und Quantenpunkten durch Ionensputtern, T. Bobek (Shaker, Aachen, 2005).