Single-mask multiple lateral nanodiamond field emission devices fabrication technique

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 2, 2006, Pages 953-957

  Subramanian, K ^a   Kang, W P ^a   Davidson, J L ^a   Choi, B K ^a   Howell, M ^a  

^a VANDERBILT UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FIELD EMISSION DEVICES; FIELD EMITTER STRUCTURES; ION ETCHING; MICROWAVE PLASMAS;

CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; GRAIN SIZE AND SHAPE; IONS; MICROWAVES; NANOSTRUCTURED MATERIALS; PLASMA ETCHING; PLASMAS;

FIELD EMISSION DISPLAYS;

EID: 33645522082     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2185653     Document Type: Article

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