Integration, electrical and electromechanical properties of PZT and PMN-PT thin films for MEMS application

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4699, Issue , 2002, Pages 114-123

  Kugeler C ^a   Hoffmann, M ^a   Bottger U ^a   Waser, R ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

MEMS; Nb doping; PMN PT; PZT

Indexed keywords

ACTUATORS; DEPOSITION; DOPING (ADDITIVES); INTERFEROMETRY; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NATURAL FREQUENCIES; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

ELECTROSTRICTIVE THIN FILMS;

PIEZOELECTRICITY;

EID: 0036028337     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.474966     Document Type: Conference Paper

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