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Volumn 45, Issue 7, 2006, Pages 1368-1374

Microstructure-related properties at 193 nm of MgF2 and GdF 3 films deposited by a resistive-heating boat

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; GADOLINIUM COMPOUNDS; LASER DAMAGE; MAGNESIUM COMPOUNDS; MICROSTRUCTURE; MULTILAYERS;

EID: 33645315495     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.001368     Document Type: Article
Times cited : (42)

References (16)
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    • Y. Taki, "Structures and optical constants of magnetronsputtered fluoride coatings for deep ultraviolet lithography," presented at the 7th International Symposium on Sputtering and Plasma Processes, Kanazawa, Japan, 11-13 June, 2003.
    • (2003) 7th International Symposium on Sputtering and Plasma Processes
    • Taki, Y.1
  • 8
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    • Optical and microstructural properties of MgF2 UV coatings grown by ion beam sputtering process
    • E. Quesnel, L. Dumas, D. Jacob, and F. Peiro, "Optical and microstructural properties of MgF2 UV coatings grown by ion beam sputtering process," J. Vac. Sci. Technol. A 18, 2869-2876 (2000).
    • (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 2869-2876
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    • Optical and structural properties of YF3 thin films prepared by ion assisted deposition or ion beam sputtering techniques
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    • (1994) Proc. SPIE , vol.2253 , pp. 195-203
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    • Optical constants determination in thin films lead-free vitreous coatings
    • O. Paredes, C. Córdoba, and J. Benavides, "Optical constants determination in thin films lead-free vitreous coatings," Superficies Vaco 9, 89-91 (1999).
    • (1999) Superficies Vaco , vol.9 , pp. 89-91
    • Paredes, O.1    Córdoba, C.2    Benavides, J.3
  • 12
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    • Study of the structure and properties of the vacuum condensation of nickel, titanium, tungsten, aluminium oxide, and zirconium dioxide
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.