Online spectrophotometric characterisation of MgF2/LaF3 - fluoride multilayer coatings production

Optics InfoBase Conference Papers

Volumn , Issue , 2001, Pages

  Günster, Stefan ^a   Kadkhoda, Puja ^a   Ristau, Detlev ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; FIBER OPTIC SENSORS; MAGNESIUM COMPOUNDS; MULTILAYERS; THERMAL EVAPORATION;

AMBIENTS; MULTI-LAYER-COATING; OPTICAL DATA; SPECTRA DATUM; SPECTRA'S; SPECTROPHOTOMETRIC CHARACTERIZATION; THERMAL EVAPORATION TECHNIQUE;

FLUORINE COMPOUNDS;

EID: 84893995150     PISSN: None     EISSN: 21622701     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. 3 thin films," in in Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, Al-Jumaily, Duparré, Singh, Editors., Proc. SPIE 4099, 299-310 (2001).
2. P. Kadkhoda, H. Blaschke, J. Kohlhaas, D. Ristau, " Investigations of transmission and reflectance in the DUV/VUV spectral range," in Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, Al-Jumaily, Duparré, Singh, Editors., Proc. SPIE 4099, 311-318 (2001).
3. P. Kadkhoda, H. Welling, S. Günster, D. Ristau, " Investigation on total scattering at 157 nm and 193 nm,” in Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, Al-Jumaily, Duparré, Singh, Editors., Proc. SPIE 4099, 65-73 (2001).