Effect of chelating agents on high resolution electron beam nanolithography of spin-coatable A12O3 gel films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 12 B, 1999, Pages 7052-7058

  Saifullah, Mohammad S M ^a   Namatsu, Hideo ^a   Yamaguchi, Toni ^a   Yamazaki, Kenji ^a   Kurihara, Kenji ^a  

^a Kashino Diverse Brain Research Laboratory of NTT Communication Science Laboratories   (Japan)

Author keywords

Al2O3 gel films; Chelating agents; Electron beam nanolithography; Nanopatterning

Indexed keywords

AGENTS; ALUMINA; CHELATION; ELECTRON CYCLOTRON RESONANCE; ETCHING; GELS; KETONES; NANOTECHNOLOGY; PLASMA APPLICATIONS; SEMICONDUCTING FILMS;

ACETYLACETONE; ALUMINUM BUTOXIDE; CHELATING AGENTS; ETHYLACETOACETATE; HIGH RESOLUTION ELECTRON BEAM NANOLITHOGRAPHY;

ELECTRON BEAM LITHOGRAPHY;

EID: 0033318389     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.7052     Document Type: Article

References (17)

1. S. D. Berger, I. G. Salisbury, R- H. Milne, D. Imeson and C. J. Humphreys: Philos. Mag. B 55 (1987) 341.
2. M. E. Mochel, C. J. Humphreys, J. A. Eades, J. M. Mochel and A. K. Petford: Appl. Phys. Letts. 42 (1983) 392.
3. R. W. Devenish, D. J. Eaglesham, D. M. Maher and C. J. Humphreys: Ultramicroscopy 28 (1989) 324.
4. J. L. Hollenbach and R. C. Buchanan: J. Mater. Res. 5 (1990) 1058.
5. C. J. Morgan, S. J. Bailey, A. R. Preston and C. J. Humphreys: Inst. Phys. Conf. Scr. 119 (1991) 503.
6. C. J. Morgan: Ph. D. Thesis, University of Cambridge, 1994.
7. M. S. M. Saifullah, C. B. Boothroyd, G. A. Botton and C. J. Humphreys: Proc. Int. Centennial Symp. The Electron, eds. Angus Kirkland and Paul D. Brown (IOM Communication Ltd., London, 1998) p. 531.
8. M. S. M. Saifullah, H. Namatsu, T. Yamaguchi, K. Yamazaki and K. Kurihara: Proc. SPIE 3678 (1999) 633.
9. K. Kurihara, K. Iwadate, H. Namatsu, M. Nagase, H. Takenaka and K. Murase: Jpn. J. Appl. Phys. 34 (1995) 6940.
10. F. Babonneau, L. Coury and J. Livage: J. Non-Cryst. Solids 121 (1990) 153.
11. R. Jain, A. K. Rai and R. C. Mehrotra: Polyhedron 5 (1986) 1017.
12. G. Zhao and N. Tohge: Kobunshi Ronbunshu 53 (1996) 253 [in Japanese].
13. M. S. M. Saifullah: Ph. D. Thesis, University of Cambridge, 1997.
14. G. Zhao and N. Tohge: Mater. Res. Bull. 33 (1998) 21.
15. G. Zhao, N. Tohge and J. Nishii: Jpn. J. Appl. Phys. 37 (1998) 1842.
16. M. L. Knotek and P. J. Feibelman: Phys. Rev. Letts. 40 (1978) 964.
17. C. Takahashi and S. Matsuo: Dry Process Symposium Proc., Tokyo (1998) p. 159.