Characterization of subsurface hydrogen in diamond films by high-resolution elastic recoil detection analysis

Physica B: Condensed Matter

Volumn 376-377, Issue 1, 2006, Pages 307-310

  Hayashi, Kazushi ^a   Kawakami, Nobuyuki ^a   Ichihara, Chikara ^a   Kobashi, Koji ^a  

^a KOBE STEEL LTD   (Japan)

Author keywords

Diamond films; Elastic recoil detection analysis; Hydrogen; Rutherford backscattering spectrometry

Indexed keywords

ANNEALING; DEUTERIUM; DIAMOND FILMS; FERMI LEVEL; OXIDATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SECONDARY ION MASS SPECTROMETRY; THIN FILMS;

ELASTIC RECOIL DETECTION ANALYSIS; RUTHERFORD BACKSCATTERING SPECTROMETRY; SUBSURFACE HYDROGEN;

HYDROGEN;

EID: 33645241669     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2005.12.079     Document Type: Conference Paper

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