Scale-up of ferro-electric packed bed reactor for C2F 6 decomposition

Thin Solid Films

Volumn 506-507, Issue , 2006, Pages 414-417

  Takaki, K ^a   Urashima, K ^b   Chang, J S ^c  

^a IWATE UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY POLICY   (Japan)

^c MCMASTER UNIVERSITY   (Canada)

Author keywords

C2F6; Dielectric barrier discharge; Ferro electric; Non thermal plasma; Packed bed; Partial discharge; PFCS; Semiconductor process flue gas

Indexed keywords

DECOMPOSITION; ELECTRIC DISCHARGES; ELECTRIC REACTORS; FERROELECTRIC DEVICES; FLUE GASES; PLASMAS; SEMICONDUCTOR MATERIALS;

DIELECTRIC BARRIER DISCHARGE; FERRO-ELECTRIC; NON-THERMAL PLASMA; PARALLELEPIPED REACTOR; PARTIAL DISCHARGE; PERFLUOROETHANE(C2F6); PFCS;

PACKED BEDS;

EID: 33645241308     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.104     Document Type: Conference Paper

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