Surface variation caused by vacuum arc cleaning of organic contaminant

Thin Solid Films

Volumn 506-507, Issue , 2006, Pages 337-341

  Sugimoto, Masaya ^a   Takeda, Koichi ^a  

^a AKITA PREFECTURAL UNIVERSITY   (Japan)

Author keywords

Cathode spot; Organic contaminant; Surface variation; Vacuum arc cleaning

Indexed keywords

CONTAMINATION; COOLING; HEATING; MOLTEN MATERIALS; QUENCHING; VAPORIZATION;

CATHODE SPOT; DISCHARGE CURRENT; SURFACE VARIATION; VACUUM ARC CLEANING;

ORGANIC COMPOUNDS;

EID: 33645235158     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.078     Document Type: Conference Paper

References (14)

1. W. Petasch, B. Kegel, H. Schmid, K. Lendenmann, and H.U. Keller Surf. Coat. Technol. 97 1997 176
2. K. Takeda, and S. Takenouchi Mater. Trans., JIM 38 7 1997 636
3. K. Takeda Surf. Coat. Technol. 131 2000 234
4. J.M. Lafferty Vacuum Arcs 1980 A Wiley-Interscience Publication 132
5. R.L. Boxmann, P.J. Martin, and P.M. Sanders Handbook of Vacuum Arc Science and Technology 1995 Noyes Publications 85
6. I. Beilis IEEE Trans. Plasma Sci. 29 5 2001 657
7. M. Sugimoto, A. Mirkarimov, S. Pozharov, and K. Takeda Thin Solid Films 457 2004 168
8. M. Sugimoto, K. Takeda, and T. Inaba J. High Temp. Soc. 28 2 2002 84
9. K. Takeda, and M. Sugimoto IEEE Trans. Plasma Sci. 29 5 2001 718
10. K. Takeda, and S. Takeuchi Thin Solid Films 407 2002 163
11. K. Takeda, and M. Sugimoto IEEE Trans. Plasma Sci. 31 5 2003 983
12. M. Sugimoto, H. Takahashi, and K. Takeda 16th International Symposium on Plasma Chemistry Proceedings, CD-ROM 2003 ISPC-496
13. T. Nakamura, H. Takahashi, K. Takeda, and M. Sugimoto Thin Solid Films 457 2004 224
14. R.L. Boxmann, P.J. Martin, and P.M. Sanders Handbook of Vacuum Arc Science and Technology 1995 Noyes Publications 122