Effects of pressure on the cleaning action of cathode spot in low vacuum

Thin Solid Films

Volumn 407, Issue 1-2, 2002, Pages 163-168

  Takeda, K ^a   Takeuchi, S ^b  

^a AKITA PREFECTURAL UNIVERSITY   (Japan)

^b NIPPON STEEL CORPORATION   (Japan)

Author keywords

Arc; Cathode; Low vacuum; Surface cleaning; Surface roughness

Indexed keywords

CATHODES; ELECTRIC ARCS; OXIDES; PRESSURE EFFECTS; SURFACE ROUGHNESS; VACUUM;

CATHODE SPOTS;

SURFACE CLEANING;

EID: 0037155435     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00032-9     Document Type: Conference Paper

References (7)

1. Materials transactions