Surface modification by cathode spots of a vacuum arc

IEEE Transactions on Plasma Science

Volumn 29, Issue 5 I, 2001, Pages 718-721

  Takeda, K ^a   Sugimoto, M ^a  

^a AKITA PREFECTURAL UNIVERSITY   (Japan)

Author keywords

Cathode spot; Cleaning; Heat treatment; Surface modification; Vacuum arc

Indexed keywords

CATHODES; HARDNESS; HEAT TREATMENT; SURFACE CLEANING; SURFACE TREATMENT;

CATHODE SPOTS; VACUUM ARC CLEANING;

PLASMA JETS;

EID: 0035485775     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.964461     Document Type: Article

References (5)

1. The deposition of TiN thin films by filtered cathodic arc techniques
2. Removal of oxide layer on metal surface by vacuum arc